3 stages of the interview.
Initial HR call
Technical phone interview
On-site day-long techncial and HR interview. Usually asked for a short presentation on your PhD research.
If you are applying in the CORE-CMOS program, make sure you are aware of the latest development in the particular group you are applying to (for example, EUV lithography for litho department). Also, try to check the latest publications from the group.
The interviewers are usually very knowledgable but friendly. They try to help you answer their question in case you are not fully sure about it.
The HR dept is a bit weird. They act very friendly till the moment you start to negotiate on the offer. Instead of talking with them about the negotiation, you should talk with your hiring manager about your concerns. Usually it works that way.