Question d’entretien chez Lam Research
How would you increase anisotropy during an etch process?
Réponses aux questions d'entretien
Utilisateur anonyme
14 nov. 2016
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.
How would you increase anisotropy during an etch process?
Utilisateur anonyme
Add inhibitor to gas flow, increase substrate bias, or reduce chamber pressure.